Although the electron beam, X-ray, ion beam has a shorter wavelength, there are more benefits to improve the resolution, but the exposure source, mask, resist, imaging optical system, there are great difficulties. On the contrary, the excimer lithography has obvious economic and practical, it will be optical lithography extends to DUV and of VUV, its high power greatly shorten the exposure time of the substrate, the resolution is easy to obtain sub-micron mask and Resist the problem easy to solve. 1992 IBM Corporation excimer lithography for the production line, the commercialization of XL-1 193 nm lithography function width of 0.25 m photoresist graphics. Recent phase-shift mask technology, the excimer lithography resolution is increased to 0.13 m. No matter it is the green laser pointer, red laser pointer or blue laser pointer or some other kinds of green laser pointer .
The other hand, the excimer laser direct etching of organic and inorganic materials with unique, single pulse removal depth between 0.05 ~ 0.1 m, which makes a simple pulse count to obtain high precision cutting. Excimer lithography equipment for materials processing improvements, such as the mask and the entire optical system able to withstand greater laser peak power density, high-magnification projection lens design of real-time residue removal system, is very suitable the recent rapid development of micro-structure, micro-mechanical processing techniques. At present, the British Exitech Microlas company in Germany, Japan, Hamamatsu Photonics has introduced the commercialization of micro-structure processing using excimer laser micro-processing equipment. There is no need for the customer to press the button f green laser pointer all the time.
The laser engraving technology applications in a highly integrated circuit production. Laser trimming technology of laser trimming is used to adjust the thick film circuit or in the film circuit, resistors, capacitors, and other functional parameters. Laser trimming, the site of exposure of heat to vaporize volatile resistance regional cross-sectional area decreases, followed by resistance to increase. Past mechanical abrasion of thick film resistors, thin film resistors using spark ablation, but the accuracy of this adjustment method is inefficient, causes severe pollution to the workpiece, causing the resistance drift after trimming, to switch the laser The fine-tuning, there are a lot of advantages. Laser trimming of the essence of punch, each punch is very shallow, rounded to the tens of nanometers to tens of microns. Here will introduce the high power performance of green laser pointer .
Then overlap into a continuous perforated line. Laser-trimmed resistor in addition to bright light will be part of the resistive film gasification, but also by noninvasive irradiation changes the structure of the membrane to adjust the resistance. Laser trimming technology is mainly used in precision resistor mediation, accuracy up to 0.1 ‰ to 0.02 ‰. Laser storage technology. Optical Storage is one of the earliest predictable laser applications, laser storage technology is the purpose of information to the reflection / reflective bands (normal surface and pits), sequence encoding, has reached the information stored. At present, the computer used to write the CD-ROM is the medium of a laser information storage and reproduction. With the development of information technology. For the pen shape laser pointer .
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